Program: QS - Al/poly(thick-Al) + C/Poly(thin-Be) - AEC1 - short exposure
File: XRTPRG-13CF
Author: SHIMOJO, Masumi
Loops: Indefinite
Duration: :01:22:57.8
Size: 196. M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

subr

1

:02.0

:01:22:50.3

196. M

1.1

QS (Al/poly - C/poly) - 1x1- 512FOV - AEC1 - short exposure

60

:02.0

:01:22:50.3

196. M

1.1.1

Al/poly (Thick-Al) - 1x1 - 4096ms

:02.0

:06.8

1.63 M

h=1024 v=1024 w=512 h=512

52%

1

KSC, SSOC

Regular

1.1.2

C/poly (Thin-Be) - 1x1 - 4096ms

:01:16.0

:01:16.0

1.63 M

h=1024 v=1024 w=512 h=512

52%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35D3: Al/poly (Thick-Al) - 1x1 - 4096ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

4096 (23)

Observation

1x1

3540: C/poly (Thin-Be) - 1x1 - 4096ms

C/Poly

Open

Thin-Be

Open

Close

Safe

Normal

4096 (23)

Observation

1x1