Program: XBP Al/poly+C/poly -FOV512 -AEC -dark
File: XRTPRG-13F9
Loops: Indefinite
Duration: :15:40.5
Size: 57.8 M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-1 |
15 |
:01:00.0 |
:15:00.0 |
54.2 M |
|||||
1.1 |
Al/poly 4096ms - FOV512 - AEC |
1 |
:02.0 |
:06.8 |
1.80 M |
|||||
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 4096ms |
:02.0 |
:06.8 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
1.2 |
C/poly 8192ms - FOV512 - AEC |
1 |
:02.0 |
:12.4 |
1.80 M |
|||||
1.2.1 |
C/poly (Thin-Be) - 1x1 - 8192ms |
:02.0 |
:12.4 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
2 |
Subr-2 |
1 |
:02.0 |
:33.0 |
3.61 M |
|||||
2.1 |
C/poly 8192ms - FOV512 - dark |
1 |
:02.0 |
:10.9 |
1.80 M |
|||||
2.1.1 |
C/Poly - 1x1 - 8192ms - Dark |
:02.0 |
:10.9 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
2.2 |
Med-Be + OP AR AEC1 |
1 |
:02.0 |
:22.1 |
1.80 M |
|||||
2.2.1 |
Med-Be (Thick-Be) - 1x1 - 16384ms |
:02.0 |
:22.1 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
Al/poly (Thick-Al) - 1x1 - 4096ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |
C/poly (Thin-Be) - 1x1 - 8192ms |
C/Poly |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
8192 (25) |
Observation |
1x1 |
C/Poly - 1x1 - 8192ms - Dark |
C/Poly |
Open |
C/Poly |
Open |
Close |
Safe |
Dark |
8192 (25) |
Observation |
1x1 |
Med-Be (Thick-Be) - 1x1 - 16384ms |
Medium-Be |
Open |
Open |
Thick-Be |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |