Program: AR topology - Al/poly, Ti/poly - long/short exp
File: XRTPRG-1434
Loops: Indefinite
Duration: :03:07.5
Size: 6.89 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:02.0 |
:03:00.0 |
6.89 M |
|||||
|
1.1 |
AR loop-Al/Poly-AEC2+3 |
1 |
:01:30.0 |
:01:30.0 |
3.61 M |
|||||
|
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 256ms |
0.5 |
:02.9 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
3 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Al/poly (Thick-Al) - 1x1 - 2048ms |
:02.0 |
:04.7 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
2 |
KSC, SSOC |
Regular |
|
|
1.2 |
Ti-poly short (256ms) /long (4096ms) pair - 512x512 |
1 |
:01:30.0 |
:01:30.0 |
3.27 M |
|||||
|
1.2.1 |
Ti/Poly (Thick Al) - 1x1 - 256ms |
0.5 |
:07.4 |
1.63 M |
h=1024 v=1024 w=512 h=512 |
52% |
3 |
KSC, SSOC |
Regular |
|
|
1.2.2 |
Ti/Poly (Thick Al) - 1x1 - 4096ms |
:02.0 |
:06.8 |
1.63 M |
h=1024 v=1024 w=512 h=512 |
52% |
2 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
Al/poly (Thick-Al) - 1x1 - 256ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |
|
Al/poly (Thick-Al) - 1x1 - 2048ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
2048 (21) |
Observation |
1x1 |
|
Ti/Poly (Thick Al) - 1x1 - 256ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |
|
Ti/Poly (Thick Al) - 1x1 - 4096ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |