Program: XBP Al/poly+C/poly+thinBe+medBe -FOV512 shifted (+72,-208) -AEC -dark revB
File: XRTPRG-1438
Loops: Indefinite
Duration: :50:21.4
Size: 218. M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

30

:01:40.0

:50:00.0

217. M

1.1

XBP Al/poly+C/poly+thinBe+medBe - FOV512 shifted +72,-208 - AEC1

1

:02.0

:01:27.7

7.23 M

1.1.1

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

1.80 M

h=1096 v=816 w=512 h=512

57%

1

KSC, SSOC

Regular

1.1.2

C/Poly (Thin-Be) - 1x1 - 11571ms

:02.0

:15.8

1.80 M

h=1096 v=816 w=512 h=512

57%

1

KSC, SSOC

Regular

1.1.3

Thin-Be (Med-Be) - 1x1 - 16384ms

:02.0

:20.6

1.80 M

h=1096 v=816 w=512 h=512

57%

1

KSC, SSOC

Regular

1.1.4

Med-Be (Thick-Be) - 1x1 - 32768ms

:02.0

:37.0

1.80 M

h=1096 v=816 w=512 h=512

57%

0

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:13.9

1.80 M

2.1

C/poly 8192ms - FOV512 - dark

1

:02.0

:13.9

1.80 M

2.1.1

C/Poly - 1x1 - 8192ms - Dark

:02.0

:13.9

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/Poly (Thick-Al) - 1x1 - 11571ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1

C/Poly (Thin-Be) - 1x1 - 11571ms

C/Poly

Open

Thin-Be

Open

Close

Safe

Normal

11571 (26)

Observation

1x1

Thin-Be (Med-Be) - 1x1 - 16384ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1

Med-Be (Thick-Be) - 1x1 - 32768ms

Medium-Be

Open

Open

Thick-Be

Close

Safe

Normal

32768 (29)

Observation

1x1

C/Poly - 1x1 - 8192ms - Dark

C/Poly

Open

C/Poly

Open

Close

Safe

Dark

8192 (25)

Observation

1x1