Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-2

1

:02.0

:01:54.5

28.9 M

1.1

Al/Poly,C/Poly,Be-thin,Be-med

1

:02.0

:01:54.5

28.9 M

1.1.1

Al/poly (C/poly) - 1x1 - 8192ms

:02.0

:13.1

7.23 M

h=1024 v=1024 w=1024 h=1024

57%

0

KSC, SSOC

Regular

1.1.2

C/poly (Thin-Be) - 1x1 - 16384ms

:02.0

:22.8

7.23 M

h=1024 v=1024 w=1024 h=1024

57%

0

KSC, SSOC

Regular

1.1.3

Thin-be (Med-be) - 1x1 32768ms

:02.0

:39.2

7.23 M

h=1024 v=1024 w=1024 h=1024

57%

0

KSC, SSOC

Regular

1.1.4

Med-Be (Thick-Be) - 1x1 - 32768ms

:02.0

:39.2

7.23 M

h=1024 v=1024 w=1024 h=1024

57%

0

KSC, SSOC

Regular

2

Subr-1

150

:02.0

:01:52:30.0

305. M

2.1

Al/poly,Be-thin

1

:45.0

:45.0

2.03 M

2.1.1

Al/poly (C/poly) - 1x1 - 8192ms

:02.0

:14.8

1.01 M

h=1024 v=1024 w=384 h=384

57%

1

KSC, SSOC

Regular

2.1.2

Thin-Be (Med-Be) - 1x1 - 16384ms

:02.0

:21.5

1.01 M

h=1024 v=1024 w=384 h=384

57%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/poly (C/poly) - 1x1 - 8192ms

Thin-Al/Polyimide

Open

C/Poly

Open

Close

Safe

Normal

8192 (25)

Observation

1x1

C/poly (Thin-Be) - 1x1 - 16384ms

C/Poly

Open

Thin-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1

Thin-be (Med-be) - 1x1 32768ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

32768 (29)

Observation

1x1

Med-Be (Thick-Be) - 1x1 - 32768ms

Medium-Be

Open

Open

Thick-Be

Close

Safe

Normal

32768 (29)

Observation

1x1

Thin-Be (Med-Be) - 1x1 - 16384ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1