Program: QS - Al/poly - C/poly - thin Be - FOV 512x512
File: XRTPRG-1450
Loops: Indefinite
Duration: :22:17.1
Size: 99.4 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:21:47.4

97.6 M

1.1

Al/Poly - Ti/poly - Thin Be - FOV 512x512

18

:02.0

:21:47.4

97.6 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 11571ms

:15.0

:15.0

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.1.2

C/poly (Thin-Be) - 1x1 - 16384ms

:20.0

:20.6

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.1.3

Thin-be (Med-be) - 1x1 32768ms

:35.0

:37.0

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:22.1

1.80 M

2.1

Al/poly - 16s - dark - FOV 512x512

1

:15.0

:22.1

1.80 M

2.1.1

Al/poly - 1x1 - 16384ms - Dark

:02.0

:22.1

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/poly (Thick-Al) - 1x1 - 11571ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1

C/poly (Thin-Be) - 1x1 - 16384ms

C/Poly

Open

Thin-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1

Thin-be (Med-be) - 1x1 32768ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

32768 (29)

Observation

1x1

Al/poly - 1x1 - 16384ms - Dark

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

16384 (27)

Observation

1x1