Program: HOP43 Al/poly - 23s exp - FOV512 + Ti/poly, thin-Be and Dark
File: XRTPRG-1455
Loops: Indefinite
Duration: :23:33.0
Size: 95.8 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

50

:02.0

:21:34.2

90.4 M

1.1

CH (Al/poly) - 23s exp - FOV512

1

:02.0

:25.8

1.80 M

1.1.1

Al/poly (Al/poly+Thick-Al) - 1x1 - 23142ms

:02.0

:25.8

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:01:51.2

5.42 M

2.1

CH (Al/poly) - 23s exp - FOV512- Dark

1

:02.0

:25.8

1.80 M

2.1.1

Al/Poly - 1x1 - 23142ms - Dark -Obs

:02.0

:25.8

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2.2

Thin-Be - 48s exp - FOV 512

1

:02.0

:52.0

1.80 M

2.2.1

Thin-Be (Med-Be) - 1x1 - 46284ms

:02.0

:52.0

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2.3

CH (Ti/poly) - 23s exp- FOV512

1

:02.0

:33.3

1.80 M

2.3.1

Ti/Poly - 1x1 - 23142ms

:02.0

:33.3

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/poly (Al/poly+Thick-Al) - 1x1 - 23142ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

23142 (28)

Observation

1x1

Al/Poly - 1x1 - 23142ms - Dark -Obs

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

23142 (28)

Observation

1x1

Thin-Be (Med-Be) - 1x1 - 46284ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

46284 (30)

Observation

1x1

Ti/Poly - 1x1 - 23142ms

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Normal

23142 (28)

Observation

1x1