Program: HOP 47 AEC Al/poly, Ti/poly, C/Poly
File: XRTPRG-145B
Loops: Indefinite
Duration: :02:07.5
Size: 5.42 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:02:00.0

5.42 M

1.1

HOP 47 Al/Poly - Ti/poly - Thin Be - FOV 512x512

1

:02:00.0

:02:00.0

5.42 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

1.80 M

h=1024 v=1024 w=512 h=512

57%

1

KSC, SSOC

Regular

1.1.2

C/poly (Thin-Be) - 1x1 - 16384ms

:20.0

:20.6

1.80 M

h=1024 v=1024 w=512 h=512

57%

1

KSC, SSOC

Regular

1.1.3

Ti/Poly (Thick Al) - 1x1 - 16384ms

:20.0

:25.1

1.80 M

h=1024 v=1024 w=512 h=512

57%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/poly (Thick-Al) - 1x1 - 11571ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1

C/poly (Thin-Be) - 1x1 - 16384ms

C/Poly

Open

Thin-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1

Ti/Poly (Thick Al) - 1x1 - 16384ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1