Program: HOP 47 AEC Al/poly, Ti/poly, C/Poly
File: XRTPRG-145B
Loops: Indefinite
Duration: :02:07.5
Size: 5.42 M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-1 |
1 |
:02.0 |
:02:00.0 |
5.42 M |
|||||
1.1 |
HOP 47 Al/Poly - Ti/poly - Thin Be - FOV 512x512 |
1 |
:02:00.0 |
:02:00.0 |
5.42 M |
|||||
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
1.1.2 |
C/poly (Thin-Be) - 1x1 - 16384ms |
:20.0 |
:20.6 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
1.1.3 |
Ti/Poly (Thick Al) - 1x1 - 16384ms |
:20.0 |
:25.1 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
Al/poly (Thick-Al) - 1x1 - 11571ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
11571 (26) |
Observation |
1x1 |
C/poly (Thin-Be) - 1x1 - 16384ms |
C/Poly |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |
Ti/Poly (Thick Al) - 1x1 - 16384ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |