Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:01:00.0

:01:31.9

4.52 M

1.1

Al/Poly-Al/Poly+Al/Mesh-Al/Poly+Ti/Poly-Ti/Poly-dark - 256x512 AEC3

1

:02.0

:01:31.9

4.52 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 8192ms

:02.0

:10.9

904. K

h=1024 v=1024 w=256 h=512

57%

3

KSC, SSOC

Regular

1.1.2

Al/poly+Al/Mesh (Al/poly+Thick-Al) - 1x1 -16384ms

:02.0

:20.6

904. K

h=1024 v=1024 w=256 h=512

57%

3

KSC, SSOC

Regular

1.1.3

Al/poly+Ti/Poly (Al/poly+Thick Al) - 1x1 - 16384ms

:02.0

:20.6

904. K

h=1024 v=1024 w=256 h=512

57%

3

KSC, SSOC

Regular

1.1.4

Ti/Poly (Thick Al) - 1x1 - 16384ms

:02.0

:20.6

904. K

h=1024 v=1024 w=256 h=512

57%

3

KSC, SSOC

Regular

1.1.5

Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

:02.0

:19.1

904. K

h=1024 v=1024 w=256 h=512

57%

0

KSC, SSOC

Regular

2

Subr-2

15

:02.0

:03:51.5

13.5 M

2.1

Al/poly 8192ms - FOV256x512 - AEC3

1

:15.0

:15.4

904. K

2.1.1

Al/poly (Thick-Al) - 1x1 - 8192ms

:02.0

:15.4

904. K

h=1024 v=1024 w=256 h=512

57%

3

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/poly (Thick-Al) - 1x1 - 8192ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

8192 (25)

Observation

1x1

Al/poly+Al/Mesh (Al/poly+Thick-Al) - 1x1 -16384ms

Thin-Al/Polyimide

Thin-Al/Mesh

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

Al/poly+Ti/Poly (Al/poly+Thick Al) - 1x1 - 16384ms

Thin-Al/Polyimide

Ti/Polyimide

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

Ti/Poly (Thick Al) - 1x1 - 16384ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Dark

16384 (27)

Observation

1x1