Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:01:29.1

5.08 M

1.1

Al/Poly-Al/Poly+Al/Mesh-Al/Poly+Ti/Poly-Ti/Poly-dark - 384x384 AEC3

1

:02.0

:01:29.1

5.08 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 8192ms

:02.0

:10.3

1.01 M

h=1024 v=1024 w=384 h=384

57%

3

KSC, SSOC

Regular

1.1.2

Al/poly+Al/Mesh (Al/poly+Thick-Al) - 1x1 -16384ms

:02.0

:20.0

1.01 M

h=1024 v=1024 w=384 h=384

57%

3

KSC, SSOC

Regular

1.1.3

Al/poly+Ti/Poly (Al/poly+Thick Al) - 1x1 - 16384ms

:02.0

:20.0

1.01 M

h=1024 v=1024 w=384 h=384

57%

3

KSC, SSOC

Regular

1.1.4

Ti/Poly (Thick Al) - 1x1 - 16384ms

:02.0

:20.0

1.01 M

h=1024 v=1024 w=384 h=384

57%

3

KSC, SSOC

Regular

1.1.5

Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

:02.0

:18.5

1.01 M

h=1024 v=1024 w=384 h=384

57%

0

KSC, SSOC

Regular

2

Subr-2

9

:40.0

:06:00.0

18.3 M

2.1

Al/poly-Al/poly+Ti/poly - FOV384 - AEC3

1

:02.0

:36.4

2.03 M

2.1.1

Al/poly (Thick-Al) - 1x1 - 8192ms

:02.0

:14.8

1.01 M

h=1024 v=1024 w=384 h=384

57%

3

KSC, SSOC

Regular

2.1.2

Al/poly+Ti/Poly (Al/poly+Thick Al) - 1x1 - 16384ms

:02.0

:21.5

1.01 M

h=1024 v=1024 w=384 h=384

57%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/poly (Thick-Al) - 1x1 - 8192ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

8192 (25)

Observation

1x1

Al/poly+Al/Mesh (Al/poly+Thick-Al) - 1x1 -16384ms

Thin-Al/Polyimide

Thin-Al/Mesh

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

Al/poly+Ti/Poly (Al/poly+Thick Al) - 1x1 - 16384ms

Thin-Al/Polyimide

Ti/Polyimide

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

Ti/Poly (Thick Al) - 1x1 - 16384ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Dark

16384 (27)

Observation

1x1