Program: Pre_bakeout(Ti/Poly+C/Poly)
File: XRTPRG-14B2
Loops: 1
Duration: :57.0
Size: 57.8 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:49.5

57.8 M

1.1

C/poly(8sec)+Ti/Poly (12 sec) 1x1 2048x2048

1

:02.0

:49.5

57.8 M

1.1.1

C/poly (Thin-Be) - 1x1 - 8192ms

:02.0

:17.6

28.9 M

h=1024 v=1024 w=2048 h=2048

57%

0

KSC, SSOC

Regular

1.1.2

Ti/Poly - 1x1 - 16384ms

:02.0

:31.8

28.9 M

h=1024 v=1024 w=2048 h=2048

57%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

C/poly (Thin-Be) - 1x1 - 8192ms

C/Poly

Open

Thin-Be

Open

Close

Safe

Normal

8192 (25)

Observation

1x1

Ti/Poly - 1x1 - 16384ms

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Normal

16384 (27)

Observation

1x1