Program: Pre_bakeout(Ti/Poly+C/Poly)
File: XRTPRG-14B2
Loops: 1
Duration: :57.0
Size: 57.8 M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-1 |
1 |
:02.0 |
:49.5 |
57.8 M |
|||||
1.1 |
C/poly(8sec)+Ti/Poly (12 sec) 1x1 2048x2048 |
1 |
:02.0 |
:49.5 |
57.8 M |
|||||
1.1.1 |
C/poly (Thin-Be) - 1x1 - 8192ms |
:02.0 |
:17.6 |
28.9 M |
h=1024 v=1024 w=2048 h=2048 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.1.2 |
Ti/Poly - 1x1 - 16384ms |
:02.0 |
:31.8 |
28.9 M |
h=1024 v=1024 w=2048 h=2048 |
57% |
0 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
C/poly (Thin-Be) - 1x1 - 8192ms |
C/Poly |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
8192 (25) |
Observation |
1x1 |
Ti/Poly - 1x1 - 16384ms |
Open |
Ti/Polyimide |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |