Program: QS - Q75 - 512x512 -Al/poly + Thin-Be
File: XRTPRG-14D7
Loops: 1
Duration: :01:03:18.9
Size: 127. M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:01:03:11.4

127. M

1.1

QS - Q75 -1x1- 512x512

90

:02.0

:01:03:11.4

127. M

1.1.1

Al/Poly (Thick-Al) - 1x1 - 11571ms

:20.0

:20.0

707. K

h=1024 v=1024 w=512 h=512

22%

1

KSC, SSOC

Regular

1.1.2

Thin-Be (Med-Be) - 1x1 - 16384ms

:20.0

:22.1

707. K

h=1024 v=1024 w=512 h=512

22%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/Poly (Thick-Al) - 1x1 - 11571ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1

Thin-Be (Med-Be) - 1x1 - 16384ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1