Program: Comp Evaluation in QS - Al/poly - Q=90, 75, 50 - bin=1x1, 2x2, 4x4
File: XRTPRG-14DD
Loops: 1
Duration: :01:48.9
Size: 7.63 M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-1 |
1 |
:02.0 |
:01:41.4 |
7.63 M |
|||||
1.1 |
Comp Evalu in QS - Al/poly - 1x1 - 512 x 512 - Q=90,75,50 |
1 |
:02.0 |
:01:11.5 |
5.82 M |
|||||
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.1.2 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
943. K |
h=1024 v=1024 w=512 h=512 |
30% |
0 |
KSC, SSOC |
Regular |
|
1.1.3 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
707. K |
h=1024 v=1024 w=512 h=512 |
22% |
0 |
KSC, SSOC |
Regular |
|
1.1.4 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
550. K |
h=1024 v=1024 w=512 h=512 |
17% |
0 |
KSC, SSOC |
Regular |
|
1.1.5 |
Al/poly - 1x1 - 11571ms - Dark - Obs |
:02.0 |
:14.3 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.2 |
Comp Evalu in QS - Al/poly - 2x2 - 512 x 512 - Q=90,75,50 |
1 |
:02.0 |
:19.8 |
1.45 M |
|||||
1.2.1 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
452. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.2.2 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
235. K |
h=1024 v=1024 w=512 h=512 |
30% |
0 |
KSC, SSOC |
Regular |
|
1.2.3 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
176. K |
h=1024 v=1024 w=512 h=512 |
22% |
0 |
KSC, SSOC |
Regular |
|
1.2.4 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
137. K |
h=1024 v=1024 w=512 h=512 |
17% |
0 |
KSC, SSOC |
Regular |
|
1.2.5 |
Al/poly - 2x2 - 2897ms - Dark |
:02.0 |
:03.9 |
452. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.3 |
Comp Evalu in QS - Al/poly - 4x4 - 512 x 512 - Q=90,75,50 |
1 |
:02.0 |
:10.0 |
363. K |
|||||
1.3.1 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
113. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
1.3.2 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
58.9 K |
h=1024 v=1024 w=512 h=512 |
30% |
0 |
KSC, SSOC |
Regular |
|
1.3.3 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
44.2 K |
h=1024 v=1024 w=512 h=512 |
22% |
0 |
KSC, SSOC |
Regular |
|
1.3.4 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
34.4 K |
h=1024 v=1024 w=512 h=512 |
17% |
0 |
KSC, SSOC |
Regular |
|
1.3.5 |
Al/poly - 4x4 - 723ms - Dark |
:02.0 |
:02.0 |
113. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
Al/poly (Thick-Al) - 1x1 - 11571ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
11571 (26) |
Observation |
1x1 |
Al/poly - 1x1 - 11571ms - Dark - Obs |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
11571 (26) |
Observation |
1x1 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
2897 (22) |
Observation |
2x2 |
Al/poly - 2x2 - 2897ms - Dark |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
2897 (22) |
Observation |
2x2 |
Al/poly (Thin-Be) - 4x4 - 723ms |
Thin-Al/Polyimide |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
723 (18) |
Observation |
4x4 |
Al/poly - 4x4 - 723ms - Dark |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
723 (18) |
Observation |
4x4 |