Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:12:00.0

7.63 M

1.1

Comp Evalu in QS - Al/poly - 1x1 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

5.82 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.1.2

Al/poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

943. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

1.1.3

Al/poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

707. K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

1.1.4

Al/poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

550. K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

1.1.5

Al/poly - 1x1 - 11571ms - Dark - Obs

:02.0

:14.3

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.2

Comp Evalu in QS - Al/poly - 2x2 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

1.45 M

1.2.1

Al/poly (Thick-Al) - 2x2 - 2897ms

:02.0

:03.9

452. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.2.2

Al/poly (Thick-Al) - 2x2 - 2897ms

:02.0

:03.9

235. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

1.2.3

Al/poly (Thick-Al) - 2x2 - 2897ms

:02.0

:03.9

176. K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

1.2.4

Al/poly (Thick-Al) - 2x2 - 2897ms

:02.0

:03.9

137. K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

1.2.5

Al/poly - 2x2 - 2897ms - Dark

:02.0

:03.9

452. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.3

Comp Evalu in QS - Al/poly - 4x4 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

363. K

1.3.1

Al/poly (Thin-Be) - 4x4 - 723ms

:02.0

:02.0

113. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.3.2

Al/poly (Thin-Be) - 4x4 - 723ms

:02.0

:02.0

58.9 K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

1.3.3

Al/poly (Thin-Be) - 4x4 - 723ms

:02.0

:02.0

44.2 K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

1.3.4

Al/poly (Thin-Be) - 4x4 - 723ms

:02.0

:02.0

34.4 K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

1.3.5

Al/poly - 4x4 - 723ms - Dark

:02.0

:02.0

113. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:12:00.0

5.26 M

2.1

Comp Evalu in QS - Thin-Be - 1x1 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

4.01 M

2.1.1

Thin-Be (Med-Be) - 1x1 -23142 ms

:02.0

:28.8

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2.1.2

Thin-Be (Med-Be) - 1x1 -23142 ms

:02.0

:25.8

943. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

2.1.3

Thin-Be (Med-Be) - 1x1 -23142 ms

:02.0

:25.8

707. K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

2.1.4

Thin-Be (Med-Be) - 1x1 -23142 ms

:02.0

:25.8

550. K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

2.2

Comp Evalu in QS - Thin-Be - 2x2 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

1.00 M

2.2.1

Thin-Be (Med-Be) - 2x2 - 5795ms

:02.0

:06.8

452. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2.2.2

Thin-Be (Med-Be) - 2x2 - 5795ms

:02.0

:06.8

235. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

2.2.3

Thin-Be (Med-Be) - 2x2 - 5795ms

:02.0

:06.8

176. K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

2.2.4

Thin-Be (Med-Be) - 2x2 - 5795ms

:02.0

:06.8

137. K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

2.3

Comp Evalu in QS - Thin-Be - 4x4 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

250. K

2.3.1

Thin-Be (Med-Be) - 4x4 -1443ms

:02.0

:02.0

113. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2.3.2

Thin-Be (Med-Be) - 4x4 -1443ms

:02.0

:02.0

58.9 K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

2.3.3

Thin-Be (Med-Be) - 4x4 -1443ms

:02.0

:02.0

44.2 K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

2.3.4

Thin-Be (Med-Be) - 4x4 -1443ms

:02.0

:02.0

34.4 K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

3

Subr-3

1

:02.0

:12:00.0

5.26 M

3.1

Comp Evalu in QS - Ti/poly - 1x1 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

4.01 M

3.1.1

Ti/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:21.8

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

3.1.2

Ti/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

943. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

3.1.3

Ti/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

707. K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

3.1.4

Ti/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:14.3

550. K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

3.2

Comp Evalu in QS - Ti/poly - 2x2 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

1.00 M

3.2.1

Ti/Poly - 2x2 - 2897 ms

:02.0

:03.9

452. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

3.2.2

Ti/Poly - 2x2 - 2897 ms

:02.0

:03.9

235. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

3.2.3

Ti/Poly - 2x2 - 2897 ms

:02.0

:03.9

176. K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

3.2.4

Ti/Poly - 2x2 - 2897 ms

:02.0

:03.9

137. K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

3.3

Comp Evalu in QS - Ti/poly - 4x4 - 512 x 512 - Q=90,75,50

1

:04:00.0

:04:00.0

250. K

3.3.1

Ti/Poly (Thick-Al) - 4x4 - 723ms

:02.0

:02.0

113. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

3.3.2

Ti/Poly (Thick-Al) - 4x4 - 723ms

:02.0

:02.0

58.9 K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

3.3.3

Ti/Poly (Thick-Al) - 4x4 - 723ms

:02.0

:02.0

44.2 K

h=1024 v=1024 w=512 h=512

22%

0

KSC, SSOC

Regular

3.3.4

Ti/Poly (Thick-Al) - 4x4 - 723ms

:02.0

:02.0

34.4 K

h=1024 v=1024 w=512 h=512

17%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/poly (Thick-Al) - 1x1 - 11571ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1

Al/poly - 1x1 - 11571ms - Dark - Obs

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

11571 (26)

Observation

1x1

Al/poly (Thick-Al) - 2x2 - 2897ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

2897 (22)

Observation

2x2

Al/poly - 2x2 - 2897ms - Dark

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

2897 (22)

Observation

2x2

Al/poly (Thin-Be) - 4x4 - 723ms

Thin-Al/Polyimide

Open

Thin-Be

Open

Close

Safe

Normal

723 (18)

Observation

4x4

Al/poly - 4x4 - 723ms - Dark

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

723 (18)

Observation

4x4

Thin-Be (Med-Be) - 1x1 -23142 ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

23142 (28)

Observation

1x1

Thin-Be (Med-Be) - 2x2 - 5795ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

5795 (24)

Observation

2x2

Thin-Be (Med-Be) - 4x4 -1443ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

1443 (20)

Observation

4x4

Ti/Poly (Thick-Al) - 1x1 - 11571ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1

Ti/Poly - 2x2 - 2897 ms

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Normal

2897 (22)

Observation

2x2

Ti/Poly (Thick-Al) - 4x4 - 723ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

723 (18)

Observation

4x4