Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

2

:10.0

:04:24.9

67.6 M

1.1

Synoptic Al/poly - Comp Q92 and higher

1

:02.0

:02:12.4

33.8 M

1.1.1

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:16.5

7.23 M

h=1024 v=1024 w=1024 h=1024

57%

0

KSC, SSOC

Regular

1.1.2

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:16.5

4.45 M

h=1024 v=1024 w=1024 h=1024

35%

0

KSC, SSOC

Regular

1.1.3

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:16.5

3.77 M

h=1024 v=1024 w=1024 h=1024

30%

0

KSC, SSOC

Regular

1.1.4

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:16.5

3.46 M

h=1024 v=1024 w=1024 h=1024

27%

0

KSC, SSOC

Regular

1.1.5

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:16.5

7.23 M

h=1024 v=1024 w=1024 h=1024

57%

0

KSC, SSOC

Regular

1.1.6

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:16.5

2.83 M

h=1024 v=1024 w=1024 h=1024

22%

0

KSC, SSOC

Regular

1.1.7

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:16.5

2.62 M

h=1024 v=1024 w=1024 h=1024

20%

0

KSC, SSOC

Regular

1.1.8

Al/Poly (Thick-Al) - 1x1 - 11571ms

:02.0

:16.5

2.20 M

h=1024 v=1024 w=1024 h=1024

17%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/Poly (Thick-Al) - 1x1 - 11571ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1