Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:04:00.0

1.35 M

1.1

QS - Al/poly+Ti/poly+Dark- 2x2 - DPCM - 512x512

1

:04:00.0

:04:00.0

1.35 M

1.1.1

Al/poly (Thick-Al) - 2x2 - 2897ms

:02.0

:03.9

452. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.1.2

Al/poly - 2x2 - 2897ms - Dark

:02.0

:03.9

452. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

1.1.3

Ti/Poly - 2x2 - 2897 ms

:02.0

:08.4

452. K

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:56:00.0

6.60 M

2.1

QS - Al/poly+Ti/poly- 2x2 - Q90 - 512x512

14

:04:00.0

:56:00.0

6.60 M

2.1.1

Al/poly (Thick-Al) - 2x2 - 2897ms

:02.0

:08.4

235. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

2.1.2

Ti/Poly - 2x2 - 2897 ms

:02.0

:08.4

235. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Al/poly (Thick-Al) - 2x2 - 2897ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

2897 (22)

Observation

2x2

Al/poly - 2x2 - 2897ms - Dark

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

2897 (22)

Observation

2x2

Ti/Poly - 2x2 - 2897 ms

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Normal

2897 (22)

Observation

2x2