Program: QS-CH AL/Poly Q90 512x512 (3.5hours)
File: XRTPRG-1506
Author: BANDO, Takamasa
Loops: 1
Duration: :01:10:07.5
Size: 132. M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

subr-1

70

:01:00.0

:01:10:00.0

132. M

1.1

Al/poly Q90 512x512

1

:02.0

:19.1

943. K

1.1.1

Al/Poly (Thick-Al) - 1x1 - 16384ms

:02.0

:19.1

943. K

h=1024 v=1024 w=512 h=512

30%

3

KSC, SSOC

Regular

1.2

Ti/Poly - 1x1 - 512x512 - AEC3 Q90

1

:02.0

:15.4

943. K

1.2.1

Ti/Poly (Thick Al) - 1x1 - 8192ms

:02.0

:15.4

943. K

h=1024 v=1024 w=512 h=512

30%

3

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35E7: Al/Poly (Thick-Al) - 1x1 - 16384ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

3603: Ti/Poly (Thick Al) - 1x1 - 8192ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

8192 (25)

Observation

1x1