Program: Comp Evaluation in AR - Al/poly, Ti/poly, Thin-Be - Q=92,85,65 - bin=1x1,2x2,4x4 -- loop=5
File: XRTPRG-1513
Author: SAVAGE, Sabrina
Loops: 5
Duration: :01:30:37.5
Size: 99.3 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:02.0 |
:06:00.0 |
8.20 M |
|||||
|
1.1 |
Comp Evalu in AR w/AEC - Al/poly - 1x1 - 512 x 512 - Q=92,85,65 |
1 |
:02:00.0 |
:02:00.0 |
6.25 M |
|||||
|
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
1.11 M |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.3 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
865. K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.4 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
655. K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.5 |
Al/poly - 1x1 - 11571ms - Dark - Obs |
:02.0 |
:14.3 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
1.2 |
Comp Evalu in AR w/AEC - Al/poly - 2x2 - 512 x 512 - Q=92,95,65 |
1 |
:02:00.0 |
:02:00.0 |
1.56 M |
|||||
|
1.2.1 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
452. K |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
1.2.2 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
278. K |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
1.2.3 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
216. K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
1.2.4 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
163. K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
|
1.2.5 |
Al/poly - 2x2 - 2897ms - Dark |
:02.0 |
:03.9 |
452. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
1.3 |
Comp Evalu in AR w/AEC - Al/poly - 4x4 - 512 x 512 - Q=92,85,75 |
1 |
:02:00.0 |
:02:00.0 |
390. K |
|||||
|
1.3.1 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
113. K |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
1.3.2 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
69.6 K |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
1.3.3 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
54.0 K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
1.3.4 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
40.9 K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
|
1.3.5 |
Al/poly - 4x4 - 723ms - Dark |
:02.0 |
:02.0 |
113. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
2 |
Subr-2 |
1 |
:02.0 |
:06:00.0 |
5.83 M |
|||||
|
2.1 |
Comp Evalu in AR w/AEC - Thin-Be - 1x1 - 512 x 512 - Q=92,85,65 |
1 |
:02:00.0 |
:02:00.0 |
4.44 M |
|||||
|
2.1.1 |
Thin-Be (Med-Be) - 1x1 -23142 ms |
:02.0 |
:28.8 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
2.1.2 |
Thin-Be (Med-Be) - 1x1 -23142 ms |
:02.0 |
:25.8 |
1.11 M |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
2.1.3 |
Thin-Be (Med-Be) - 1x1 -23142 ms |
:02.0 |
:25.8 |
865. K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
2.1.4 |
Thin-Be (Med-Be) - 1x1 -23142 ms |
:02.0 |
:25.8 |
655. K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
|
2.2 |
Comp Evalu in AR w/AEC - Thin-Be - 2x2 - 512 x 512 - Q=92,85,65 |
1 |
:02:00.0 |
:02:00.0 |
1.11 M |
|||||
|
2.2.1 |
Thin-Be (Med-Be) - 2x2 - 5795ms |
:02.0 |
:06.8 |
452. K |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
2.2.2 |
Thin-Be (Med-Be) - 2x2 - 5795ms |
:02.0 |
:06.8 |
278. K |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
2.2.3 |
Thin-Be (Med-Be) - 2x2 - 5795ms |
:02.0 |
:06.8 |
216. K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
2.2.4 |
Thin-Be (Med-Be) - 2x2 - 5795ms |
:02.0 |
:06.8 |
163. K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
|
2.3 |
Comp Evalu in AR w/AEC - Thin-Be - 4x4 - 512 x 512 - Q=92,85,65 |
1 |
:02:00.0 |
:02:00.0 |
277. K |
|||||
|
2.3.1 |
Thin-Be (Med-Be) - 4x4 -1443ms |
:02.0 |
:02.0 |
113. K |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
2.3.2 |
Thin-Be (Med-Be) - 4x4 -1443ms |
:02.0 |
:02.0 |
69.6 K |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
2.3.3 |
Thin-Be (Med-Be) - 4x4 -1443ms |
:02.0 |
:02.0 |
54.0 K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
2.3.4 |
Thin-Be (Med-Be) - 4x4 -1443ms |
:02.0 |
:02.0 |
40.9 K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
|
3 |
Subr-3 |
1 |
:02.0 |
:06:00.0 |
5.83 M |
|||||
|
3.1 |
Comp Evalu in AR w/AEC - Ti/poly - 1x1 - 512 x 512 - Q=92,85,65 |
1 |
:02:00.0 |
:02:00.0 |
4.44 M |
|||||
|
3.1.1 |
Ti/Poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:21.8 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
3.1.2 |
Ti/Poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
1.11 M |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
3.1.3 |
Ti/Poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
865. K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
3.1.4 |
Ti/Poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
655. K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
|
3.2 |
Comp Evalu in AR w/AEC - Ti/poly - 2x2 - 512 x 512 - Q=92,85,65 |
1 |
:02:00.0 |
:02:00.0 |
1.11 M |
|||||
|
3.2.1 |
Ti/Poly - 2x2 - 2897 ms |
:02.0 |
:03.9 |
452. K |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
3.2.2 |
Ti/Poly - 2x2 - 2897 ms |
:02.0 |
:03.9 |
278. K |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
3.2.3 |
Ti/Poly - 2x2 - 2897 ms |
:02.0 |
:03.9 |
216. K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
3.2.4 |
Ti/Poly - 2x2 - 2897 ms |
:02.0 |
:03.9 |
163. K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
|
3.3 |
Comp Evalu in AR w/AEC - Ti/poly - 4x4 - 512 x 512 - Q=92,85,65 |
1 |
:02:00.0 |
:02:00.0 |
277. K |
|||||
|
3.3.1 |
Ti/Poly (Thick-Al) - 4x4 - 723ms |
:02.0 |
:02.0 |
113. K |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
3.3.2 |
Ti/Poly (Thick-Al) - 4x4 - 723ms |
:02.0 |
:02.0 |
69.6 K |
h=1024 v=1024 w=512 h=512 |
35% |
1 |
KSC, SSOC |
Regular |
|
|
3.3.3 |
Ti/Poly (Thick-Al) - 4x4 - 723ms |
:02.0 |
:02.0 |
54.0 K |
h=1024 v=1024 w=512 h=512 |
27% |
1 |
KSC, SSOC |
Regular |
|
|
3.3.4 |
Ti/Poly (Thick-Al) - 4x4 - 723ms |
:02.0 |
:02.0 |
40.9 K |
h=1024 v=1024 w=512 h=512 |
20% |
1 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
3640: Al/poly (Thick-Al) - 1x1 - 11571ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
11571 (26) |
Observation |
1x1 |
|
355A: Al/poly - 1x1 - 11571ms - Dark - Obs |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
11571 (26) |
Observation |
1x1 |
|
3717: Al/poly (Thick-Al) - 2x2 - 2897ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
2897 (22) |
Observation |
2x2 |
|
3725: Al/poly - 2x2 - 2897ms - Dark |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
2897 (22) |
Observation |
2x2 |
|
3718: Al/poly (Thin-Be) - 4x4 - 723ms |
Thin-Al/Polyimide |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
723 (18) |
Observation |
4x4 |
|
3726: Al/poly - 4x4 - 723ms - Dark |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
723 (18) |
Observation |
4x4 |
|
3657: Thin-Be (Med-Be) - 1x1 -23142 ms |
Thin-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
23142 (28) |
Observation |
1x1 |
|
3720: Thin-Be (Med-Be) - 2x2 - 5795ms |
Thin-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
5795 (24) |
Observation |
2x2 |
|
3724: Thin-Be (Med-Be) - 4x4 -1443ms |
Thin-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
1443 (20) |
Observation |
4x4 |
|
3677: Ti/Poly (Thick-Al) - 1x1 - 11571ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
11571 (26) |
Observation |
1x1 |
|
3696: Ti/Poly - 2x2 - 2897 ms |
Open |
Ti/Polyimide |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
2897 (22) |
Observation |
2x2 |
|
3716: Ti/Poly (Thick-Al) - 4x4 - 723ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
723 (18) |
Observation |
4x4 |