Program: Multi-filter - 1x1 + 2x2 - 512FOV - AEC1 Q90
File: XRTPRG-1517
Author: SAVAGE, Sabrina
Loops: Indefinite
Duration: :04:37.5
Size: 3.30 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:03:30.0

:03:30.0

3.06 M

1.1

Multi-filter - 1x1 + 2x2 - FOV512 - AEC1 Q90

1

:02.0

:01:40.6

3.06 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 2048ms

:10.0

:10.0

943. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

1.1.2

C/Poly (Med-Be) - 2x2 - 1024ms

:15.0

:15.0

235. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

1.1.3

Al/Mesh (Ti/poly) - 2x2 - 512ms

:20.0

:20.0

235. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

1.1.4

Ti/Poly (Thick Al) - 1x1 - 2048ms

:10.0

:10.0

943. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

1.1.5

Med-Al - 2x2 - 4096ms

:15.0

:15.6

235. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

1.1.6

Med-Be - 2x2 - 5795ms

:20.0

:20.0

235. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

1.1.7

Thin-Be - 2x2 - 2048ms

:10.0

:10.0

235. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

2

Subr-2

1

:01:00.0

:01:00.0

235. K

2.1

Dark Cal - Al/poly - 2x2 - 512x512 - 512ms Q90

1

:02.0

:04.5

235. K

2.1.1

Al/poly - 2x2 - 512ms - Dark

:02.0

:04.5

235. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35E3: Al/poly (Thick-Al) - 1x1 - 2048ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

2048 (21)

Observation

1x1

3707: C/Poly (Med-Be) - 2x2 - 1024ms

C/Poly

Open

Medium-Be

Open

Close

Safe

Normal

1024 (19)

Observation

2x2

3615: Al/Mesh (Ti/poly) - 2x2 - 512ms

Open

Thin-Al/Mesh

Open

Ti/Polyimide

Close

Safe

Normal

512 (17)

Observation

2x2

3639: Ti/Poly (Thick Al) - 1x1 - 2048ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

2048 (21)

Observation

1x1

3585: Med-Al - 2x2 - 4096ms

Medium-Al

Open

Medium-Al

Open

Close

Safe

Normal

4096 (23)

Observation

2x2

3739: Med-Be - 2x2 - 5795ms

Medium-Be

Open

Medium-Be

Open

Close

Safe

Normal

5795 (24)

Observation

2x2

3583: Thin-Be - 2x2 - 2048ms

Thin-Be

Open

Thin-Be

Open

Close

Safe

Normal

2048 (21)

Observation

2x2

3706: Al/poly - 2x2 - 512ms - Dark

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

512 (17)

Observation

2x2