Program: CH Boundary - Al/poly + C/poly - AEC 1 - FOV 256x384 - 60s cadence - Q90
File: XRTPRG-151E
Author: BANDO, Takamasa
Loops: 2
Duration: :03:40:55.1
Size: 156. M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:01:50:00.0

77.8 M

1.1

CH Multi-filter Al/Poly C/poly sequence Q90

110

:01:00.0

:01:50:00.0

77.8 M

1.1.1

Al/Poly (Thin-Be) - 1x1 - 8192ms

:02.0

:10.3

353. K

h=1024 v=1024 w=256 h=384

30%

1

KSC, SSOC

Regular

1.1.2

C/poly (Thin-Be) - 1x1 - 8192ms

:02.0

:11.8

353. K

h=1024 v=1024 w=256 h=384

30%

1

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:20.0

353. K

2.1

CH (Al/poly) - 16s exp - FOV 256x384 - DARK Q90

1

:02.0

:20.0

353. K

2.1.1

Al/poly - 1x1 - 16384ms - Dark

:02.0

:20.0

353. K

h=1024 v=1024 w=256 h=384

30%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

367C: Al/Poly (Thin-Be) - 1x1 - 8192ms

Thin-Al/Polyimide

Open

Thin-Be

Open

Close

Safe

Normal

8192 (25)

Observation

1x1

358E: C/poly (Thin-Be) - 1x1 - 8192ms

C/Poly

Open

Thin-Be

Open

Close

Safe

Normal

8192 (25)

Observation

1x1

35E2: Al/poly - 1x1 - 16384ms - Dark

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

16384 (27)

Observation

1x1