Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

5

:02:00.0

:10:00.0

4.71 M

1.1

Al/poly Q90 512x512 8s no_AEC

1

:02.0

:10.9

943. K

1.1.1

Al/poly (Thick-Al) - 1x1 - 8192ms

:02.0

:10.9

943. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:57.0

1.88 M

2.1

Ti/poly Q90 512x512 16s no_AEC

1

:02.0

:23.6

943. K

2.1.1

Ti/Poly - 1x1 - 16384ms

:02.0

:23.6

943. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

2.2

Thin-Be Q90 512x512 23s no_AEC

1

:02.0

:33.3

943. K

2.2.1

Thin-Be - 1x1 - 23142ms

:02.0

:33.3

943. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35E4: Al/poly (Thick-Al) - 1x1 - 8192ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

8192 (25)

Observation

1x1

3613: Ti/Poly - 1x1 - 16384ms

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Normal

16384 (27)

Observation

1x1

36D6: Thin-Be - 1x1 - 23142ms

Thin-Be

Open

Thin-Be

Open

Close

Safe

Normal

23142 (28)

Observation

1x1