Program: AR - Al/poly + Thin-Be - 1x1 512FOV AEC1
File: XRTPRG-1520
Author: BANDO, Takamasa
Loops: 1
Duration: :01:00:07.5
Size: 56.6 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:01:00:00.0

56.6 M

1.1

AR - Al/poly+Thin-Be- 1x1 - Q90 - 512x512 - AEC

30

:02:00.0

:01:00:00.0

56.6 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 2048ms

:02.0

:04.7

943. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

1.1.2

Thin-Be (Med-Be) - 1x1 - 4096ms

:02.0

:09.8

943. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35E3: Al/poly (Thick-Al) - 1x1 - 2048ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

2048 (21)

Observation

1x1

353D: Thin-Be (Med-Be) - 1x1 - 4096ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

4096 (23)

Observation

1x1