Program: Three filter - Al/poly - Al/poly+Ti/poly - Ti/poly
File: XRTPRG-1527
Author: LEE, Jin-Yi
Loops: Indefinite
Duration: :01:07.5
Size: 707. K
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:01:00.0 |
:01:00.0 |
707. K |
|||||
|
1.1 |
Three filter - Al/poly - Al/poly+Ti/poly - Ti/poly |
1 |
:04.0 |
:14.8 |
707. K |
|||||
|
1.1.1 |
Al/poly (C/poly) - 1x1 - 128ms |
:02.0 |
:02.0 |
235. K |
h=1024 v=1024 w=256 h=256 |
30% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Al/poly+Ti/Poly (Al/poly+Thick-Al) - 1x1 - 4096ms |
:02.0 |
:08.7 |
235. K |
h=1024 v=1024 w=256 h=256 |
30% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.3 |
Ti/Poly (Thick Al) - 1x1 -1024ms |
:02.0 |
:04.1 |
235. K |
h=1024 v=1024 w=256 h=256 |
30% |
1 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
3526: Al/poly (C/poly) - 1x1 - 128ms |
Thin-Al/Polyimide |
Open |
C/Poly |
Open |
Close |
Safe |
Normal |
128 (13) |
Observation |
1x1 |
|
35ED: Al/poly+Ti/Poly (Al/poly+Thick-Al) - 1x1 - 4096ms |
Thin-Al/Polyimide |
Ti/Polyimide |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |
|
3647: Ti/Poly (Thick Al) - 1x1 -1024ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
1024 (19) |
Observation |
1x1 |