Program: AR - Al/poly + Ti/poly - Q90 - 1x1 - 256FOV with context
File: XRTPRG-1536
Author: LEE, Jin-Yi
Loops: Indefinite
Duration: :01:00:15.7
Size: 15.0 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:01:00:00.0

14.1 M

1.1

Al/poly + Ti/poly - 1x1 - Q90 - 256x256 - AEC1

30

:02:00.0

:01:00:00.0

14.1 M

1.1.1

Al/poly (C/poly) - 1x1 - 256ms

:02.0

:02.0

235. K

h=1024 v=1024 w=256 h=256

30%

1

KSC, SSOC

Regular

1.1.2

Ti/Poly (Thick Al) - 1x1 -1024ms

:02.0

:07.1

235. K

h=1024 v=1024 w=256 h=256

30%

1

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:08.2

943. K

2.1

Al/poly Q90 512x512 AEC1

1

:04.0

:08.2

943. K

2.1.1

Al/poly (C/poly) - 1x1 - 1024ms

:02.0

:08.2

943. K

h=1024 v=1024 w=512 h=512

30%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

3530: Al/poly (C/poly) - 1x1 - 256ms

Thin-Al/Polyimide

Open

C/Poly

Open

Close

Safe

Normal

256 (15)

Observation

1x1

3647: Ti/Poly (Thick Al) - 1x1 -1024ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

1024 (19)

Observation

1x1

3523: Al/poly (C/poly) - 1x1 - 1024ms

Thin-Al/Polyimide

Open

C/Poly

Open

Close

Safe

Normal

1024 (19)

Observation

1x1