Program: Multi-filter - 8x8 + 2x2 - 2048FOV - AEC1 Q90
File: XRTPRG-157A
Author: MINOSHIMA, Takashi
Loops: Indefinite
Duration: :04:37.5
Size: 1.18 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:03:30.0

:03:30.0

943. K

1.1

Multi-filter - 8x8 - FOV2048 - AEC0 Q90 - Al/p-C/p-Al/p+Ti/p-ThinBe

1

:02.0

:20.9

943. K

1.1.1

Al/poly - 8x8 - 128ms

:02.0

:02.0

235. K

h=1024 v=1024 w=2048 h=2048

30%

0

KSC, SSOC

Regular

1.1.2

C/poly - 256 ms - 8x8

:02.0

:02.4

235. K

h=1024 v=1024 w=2048 h=2048

30%

0

KSC, SSOC

Regular

1.1.3

Al/poly+Ti/Poly (Al/poly+Thick-Al) - 8x8 - 512ms

:02.0

:05.7

235. K

h=1024 v=1024 w=2048 h=2048

30%

0

KSC, SSOC

Regular

1.1.4

Thin-Be - 8x8 - 4096ms

:02.0

:10.7

235. K

h=1024 v=1024 w=2048 h=2048

30%

0

KSC, SSOC

Regular

2

Subr-2

1

:01:00.0

:01:00.0

235. K

2.1

Dark Cal - Al/poly - 2x2 - 512x512 - 512ms Q90

1

:02.0

:04.5

235. K

2.1.1

Al/poly - 2x2 - 512ms - Dark

:02.0

:04.5

235. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

3774: Al/poly - 8x8 - 128ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Normal

128 (13)

Observation

8x8

3772: C/poly - 256 ms - 8x8

C/Poly

Open

C/Poly

Open

Close

Safe

Normal

256 (15)

Observation

8x8

3775: Al/poly+Ti/Poly (Al/poly+Thick-Al) - 8x8 - 512ms

Thin-Al/Polyimide

Ti/Polyimide

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

512 (17)

Observation

8x8

3777: Thin-Be - 8x8 - 4096ms

Thin-Be

Open

Thin-Be

Open

Close

Safe

Normal

4096 (23)

Observation

8x8

3706: Al/poly - 2x2 - 512ms - Dark

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Dark

512 (17)

Observation

2x2