Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:06:00.0

:07:15.7

10.6 M

1.1

Al/poly + Ti/poly - 1x1 - Q90 - 384x384 - AEC0

10

:04.0

:07:15.7

10.6 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 11571ms

:02.0

:13.7

530. K

h=1024 v=1024 w=384 h=384

30%

0

KSC, SSOC

Regular

1.1.2

Ti/Poly - 1x1 - 23142ms

:02.0

:29.8

530. K

h=1024 v=1024 w=384 h=384

30%

0

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:01:15.2

530. K

2.1

Thin-Be 1x1 64sec Q90 FOV384x384 - AEC0

1

:02.0

:01:15.2

530. K

2.1.1

Thin-Be - 1x1 - 65536ms

:02.0

:01:15.2

530. K

h=1024 v=1024 w=384 h=384

30%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

3640: Al/poly (Thick-Al) - 1x1 - 11571ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

11571 (26)

Observation

1x1

360C: Ti/Poly - 1x1 - 23142ms

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Normal

23142 (28)

Observation

1x1

36C4: Thin-Be - 1x1 - 65536ms

Thin-Be

Open

Thin-Be

Open

Close

Safe

Normal

65536 (31)

Observation

1x1