Program: CH - Al/poly + Ti/poly + Thin-Be - AEC 1 - FOV 512x512 - 3 min cadence - lossless
File: XRTPRG-15C6
Author: MATSUMOTO, Takuma
Loops: Indefinite
Duration: :01:30:07.5
Size: 162. M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-2

1

:02.0

:01:30:00.0

162. M

1.1

CH Multi-filter Al/Poly Ti/poly Thin-Be sequence - FOV512 - Q100

30

:03:00.0

:01:30:00.0

162. M

1.1.1

Al/Poly (Thin-Be) - 1x1 - 8192ms

:02.0

:10.9

1.80 M

h=1024 v=1024 w=512 h=512

57%

1

KSC, SSOC

Regular

1.1.2

Ti/Poly (Thick Al) - 1x1 - 16384ms

:02.0

:23.6

1.80 M

h=1024 v=1024 w=512 h=512

57%

1

KSC, SSOC

Regular

1.1.3

Thin-Be - 1x1 - 65536ms

:02.0

:01:15.7

1.80 M

h=1024 v=1024 w=512 h=512

57%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

367C: Al/Poly (Thin-Be) - 1x1 - 8192ms

Thin-Al/Polyimide

Open

Thin-Be

Open

Close

Safe

Normal

8192 (25)

Observation

1x1

363A: Ti/Poly (Thick Al) - 1x1 - 16384ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

36C4: Thin-Be - 1x1 - 65536ms

Thin-Be

Open

Thin-Be

Open

Close

Safe

Normal

65536 (31)

Observation

1x1