Program: CH - Al/poly 16sec 384x384
File: XRTPRG-15D0
Author: SAVCHEVA, Antonia
Loops: Indefinite
Duration: :01:07.5
Size: 921. K

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:02.0

:01:00.0

921. K

1.1

Al/poly 16secs 384x384 Q95-2

1

:02.0

:01:00.0

921. K

1.1.1

Al/poly - 1x1 - 16384ms

:01:00.0

:01:00.0

921. K

h=1024 v=1024 w=384 h=384

52%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

351E: Al/poly - 1x1 - 16384ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Normal

16384 (27)

Observation

1x1