Program: Alignment EIS-SOT- Al/poly(512x512) lossless
File: XRTPRG-15EF
Author: FARID, Samaiyah
Loops: 1
Duration: :16:07.5
Size: 7.23 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
4 |
:04:00.0 |
:16:00.0 |
7.23 M |
|||||
|
1.1 |
Alpoly-512x512-1x1-lossless-AEC4 |
1 |
:01:00.0 |
:01:00.0 |
1.80 M |
|||||
|
1.1.1 |
Al/poly - 1x1 - 16384ms |
:02.0 |
:19.1 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
4 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
351E: Al/poly - 1x1 - 16384ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |