Program: QS dynamics - Al/poly (12s) 384x384 - Q95 - 25s-cad
File: XRTPRG-1625
Author: ISHIBASHI, Bish
Loops: Indefinite
Duration: :32.5
Size: 774. K

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:25.0

:25.0

774. K

1.1

Al/poly - 384x384 - 12s - Q95

1

:02.0

:13.7

774. K

1.1.1

Al/poly - 1x1 - 11571ms

:02.0

:13.7

774. K

h=1024 v=1024 w=384 h=384

43%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

374D: Al/poly - 1x1 - 11571ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Normal

11571 (26)

Observation

1x1