Program: Al/poly 512x256 FOV Q95 - 60s-cad - Ti/poly context - AEC1-2
File: XRTPRG-1635
Author: KORRECK, Kelly
Loops: Indefinite
Duration: :37:37.5
Size: 22.0 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
30 |
:01:10.0 |
:35:00.0 |
20.6 M |
|||||
|
1.1 |
Al/poly - 512x256- 2s - Q95 - AEC1 |
1 |
:30.0 |
:30.0 |
688. K |
|||||
|
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 2048ms |
:02.0 |
:03.6 |
688. K |
h=1024 v=1024 w=512 h=256 |
43% |
1 |
KSC, SSOC |
Regular |
|
|
2 |
Subr-2 |
1 |
:04.0 |
:02:30.0 |
1.37 M |
|||||
|
2.1 |
Ti/Poly -1x1-512x256 Q95 AEC1 |
2 |
:01:15.0 |
:02:30.0 |
1.37 M |
|||||
|
2.1.1 |
Ti/Poly (Thick Al) - 1x1 - 4096ms |
:02.0 |
:10.2 |
688. K |
h=1024 v=1024 w=512 h=256 |
43% |
1 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
35E3: Al/poly (Thick-Al) - 1x1 - 2048ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
2048 (21) |
Observation |
1x1 |
|
353B: Ti/Poly (Thick Al) - 1x1 - 4096ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |