Program: Al/poly(384x384) Q95-AEC4(8192ms)-1min cadence
File: XRTPRG-1694
Author: REEVES, Kathy
Loops: Indefinite
Duration: :01:07.5
Size: 774. K

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

1

:01:00.0

:01:00.0

774. K

1.1

Alpoly-384x384-1x1-Q95-AEC4-8192ms

1

:04.0

:10.3

774. K

1.1.1

Al/Poly - 1x1 - 8192ms

:02.0

:10.3

774. K

h=1024 v=1024 w=384 h=384

43%

4

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

36B5: Al/Poly - 1x1 - 8192ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Open

Close

Safe

Normal

8192 (25)

Observation

1x1