Program: Al/poly - AEC -2min-cad - FOV512
File: XRTPRG-169A
Author: SAVCHEVA, Antonia
Loops: Indefinite
Duration: :02:07.5
Size: 1.80 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-A |
1 |
:02:00.0 |
:02:00.0 |
1.80 M |
|||||
|
1.1 |
Al/poly - AEC - 512x512 |
1 |
:02.0 |
:06.8 |
1.80 M |
|||||
|
1.1.1 |
Al/poly - 1x1 - 4096ms |
:02.0 |
:06.8 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
2 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
361E: Al/poly - 1x1 - 4096ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |