Program: QS obs Ti/poly and Al/mesh 120sec seq
File: XRTPRG-17A7
Author: SAKO, Nobuharu
Loops: Indefinite
Duration: :02:07.5
Size: 1.54 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02:00.0

:02:00.0

1.54 M

1.1

Al/mesh and Ti/poly-1x1-384FOV - Q95 -AEC4

1

:02.0

:18.1

1.54 M

1.1.1

Al/Mesh (Ti/poly) - 1x1 - 4096ms

:02.0

:06.2

774. K

h=1064 v=1048 w=384 h=384

43%

4

KSC, SSOC

Regular

1.1.2

Ti/Poly (Thick Al) - 1x1 - 8192ms

:02.0

:11.8

774. K

h=1064 v=1048 w=384 h=384

43%

4

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

358F: Al/Mesh (Ti/poly) - 1x1 - 4096ms

Open

Thin-Al/Mesh

Open

Ti/Polyimide

Close

Safe

Normal

4096 (23)

Observation

1x1

3603: Ti/Poly (Thick Al) - 1x1 - 8192ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

8192 (25)

Observation

1x1