Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

8

:05:00.0

:01:20:00.0

12.3 M

1.1

CH Ti/poly - 768x384 - Q95

1

:02:00.0

:10:00.0

1.54 M

1.1.1

Ti/Poly - 1x1 - 23142ms

:10:00.0

:10:00.0

1.54 M

h=1024 v=1024 w=768 h=384

43%

0

KSC, SSOC

Regular

2

Subr-B

1

:02.0

:34.9

2.49 M

2.1

G-Band Alignment - 1x1 - 512FOV- Q90

1

:02.0

:04.9

943. K

2.1.1

G-Band - 1x1 - 64ms

:02.0

:03.4

943. K

h=1024 v=1024 w=512 h=512

30%

0

KSC, SSOC

Regular

2.2

Thick-Al (23 s) AEC0- Q90

1

:02.0

:30.0

1.54 M

2.2.1

Thick-Al - 1x1 - 23142ms

:30.0

:30.0

1.54 M

h=1024 v=1024 w=768 h=384

43%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

360C: Ti/Poly - 1x1 - 23142ms

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Normal

23142 (28)

Observation

1x1

3605: G-Band - 1x1 - 64ms

Open

G-band

Open

G-band

Open

Safe

Normal

64 (11)

Observation

1x1

3611: Thick-Al - 1x1 - 23142ms

Open

Thick-Al

Open

Thick-Al

Close

Safe

Normal

23142 (28)

Observation

1x1