Program: FW1 Test, med-Al+Ti/poly, 16s AEC0, 384FOV
File: XRTPRG-1802
Author: MCKENZIE, David
Loops: 1
Duration: :02:12.5
Size: 3.87 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:02:05.0

3.87 M

1.1

Med-Al+Ti/Poly test - 384FOV - AEC0

5

:25.0

:02:05.0

3.87 M

1.1.1

Med-Al+Ti/Poly - 1x1 - 16384 ms

:02.0

:18.5

774. K

h=1024 v=1024 w=384 h=384

43%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

385B: Med-Al+Ti/Poly - 1x1 - 16384 ms

Medium-Al

Ti/Polyimide

Medium-Al

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1