Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:45.0

1.11 M

1.1

AR Evolution (Al/poly fall to Al/Poly+thick-Al)-Q90

1

:45.0

:45.0

1.11 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 256ms

:02.0

:02.9

1.11 M

h=1064 v=1048 w=512 h=512

35%

1

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35D4: Al/poly (Thick-Al) - 1x1 - 256ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

256 (15)

Observation

1x1