Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:30.0

774. K

1.1

Al/Poly (Al/Poly + Ti/poly) - 384x384FOV - AEC3 - 1064 1048 - With PFB

1

:30.0

:30.0

774. K

1.1.1

Al/poly (Thick-Al) - 1x1 - 256ms

:04.0

:05.4

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

1.1.2

Al/poly (Thick-Al) - 1x1 - 256ms

:04.0

:04.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-1

1.1.3

Al/poly (Thick-Al) - 1x1 - 256ms

:04.0

:04.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-2

1.1.4

Al/poly (Thick-Al) - 1x1 - 256ms

:04.0

:04.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-3

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35D4: Al/poly (Thick-Al) - 1x1 - 256ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

256 (15)

Observation

1x1