Program: Ti/poly short(256x256)/long(512x512) - 1min cad +Thin-Be, Al/Mesh-512x512- 1hr cad
File: XRTPRG-1854
Author: YOSHIMURA, Keiji
Loops: Indefinite
Duration: :01:00:35.8
Size: 126. M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-A |
1 |
:02.0 |
:28.3 |
3.27 M |
|||||
|
1.1 |
Al/Mesh(Ti/Poly) and thin-be(med-be) - 512FOV - 2x2 - AEC3 - offset |
1 |
:02.0 |
:28.3 |
3.27 M |
|||||
|
1.1.1 |
Al/Mesh (Ti/poly) - 1x1 - 512ms |
:02.0 |
:03.2 |
1.63 M |
h=1064 v=1048 w=512 h=512 |
52% |
3 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Thin-Be (Med-Be) - 1x1 - 16384ms |
:02.0 |
:25.1 |
1.63 M |
h=1064 v=1048 w=512 h=512 |
52% |
3 |
KSC, SSOC |
Regular |
|
|
2 |
Subr-B |
60 |
:02.0 |
:01:00:00.0 |
122. M |
|||||
|
2.1 |
Ti-poly short (256x256) /long (512x512) pair - offset |
1 |
:01:00.0 |
:01:00.0 |
2.04 M |
|||||
|
2.1.1 |
Ti/Poly (Thick Al) - 1x1 - 256ms |
:02.0 |
:09.3 |
409. K |
h=1064 v=1048 w=256 h=256 |
52% |
3 |
KSC, SSOC |
Regular |
|
|
2.1.2 |
Ti/Poly (Thick Al) - 1x1 - 4096ms |
:02.0 |
:06.8 |
1.63 M |
h=1064 v=1048 w=512 h=512 |
52% |
2 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
3602: Al/Mesh (Ti/poly) - 1x1 - 512ms |
Open |
Thin-Al/Mesh |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
512 (17) |
Observation |
1x1 |
|
358C: Thin-Be (Med-Be) - 1x1 - 16384ms |
Thin-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |
|
353A: Ti/Poly (Thick Al) - 1x1 - 256ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
256 (15) |
Observation |
1x1 |
|
353B: Ti/Poly (Thick Al) - 1x1 - 4096ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |