Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:39.0

8.91 M

1.1

Al/Poly and Thin-Be - 512FOV - AEC2 - Q92

4

:02.0

:39.0

8.91 M

1.1.1

Al/poly (Thick-Al) - 1x1 - 256ms

0.5

:02.9

1.11 M

h=1064 v=1048 w=512 h=512

35%

2

KSC, SSOC

Regular

1.1.2

Thin-Be (Thin-Be) - 1x1 - 1024ms

:02.0

:06.7

1.11 M

h=1024 v=1024 w=512 h=512

35%

2

KSC, SSOC

Regular

2

Subr-B

1

:02.0

:01:00:00.0

44.5 M

2.1

Al/Mesh(Ti/Poly) and Ti/Poly(Thick-Al)-512FOV-AEC2- offset-Q92

20

:03:00.0

:01:00:00.0

44.5 M

2.1.1

Al/Mesh (Ti/poly) - 1x1 - 256ms

:02.0

:08.9

1.11 M

h=1064 v=1048 w=512 h=512

35%

2

KSC, SSOC

Regular

2.1.2

Ti/Poly (Thick Al) - 1x1 - 512ms

:02.0

:04.7

1.11 M

h=1064 v=1048 w=512 h=512

35%

2

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

35D4: Al/poly (Thick-Al) - 1x1 - 256ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

256 (15)

Observation

1x1

35D8: Thin-Be (Thin-Be) - 1x1 - 1024ms

Thin-Be

Open

Thin-Be

Open

Close

Safe

Normal

1024 (19)

Observation

1x1

360E: Al/Mesh (Ti/poly) - 1x1 - 256ms

Open

Thin-Al/Mesh

Open

Ti/Polyimide

Close

Safe

Normal

256 (15)

Observation

1x1

352F: Ti/Poly (Thick Al) - 1x1 - 512ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1