Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:01:55.0

6.19 M

1.1

Ti/poly (Thick-Al), thin-Be (med-Be) - 384FOV - AEC3 - 1064 1048 for normal AR

4

:02.0

:01:55.0

6.19 M

1.1.1

Ti/Poly (Thick Al) - 1x1 - 512ms

:02.0

:02.6

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

1.1.2

Thin-Be (Med-Be) - 1x1 - 16384ms

:02.0

:26.0

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2

Subr-B

1

:02.0

:01:00:00.0

30.9 M

2.1

Al/Mesh-Ti/Poly-1x1-384x384-AEC3-Q95-at_1064_1048

20

:03:00.0

:01:00:00.0

30.9 M

2.1.1

Al/Mesh (Thick-Al) - 1x1 - 512ms

:02.0

:08.6

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2.1.2

Ti/Poly (Thick Be) - 1x1 -1024ms

:58.0

:58.0

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

352F: Ti/Poly (Thick Al) - 1x1 - 512ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

358C: Thin-Be (Med-Be) - 1x1 - 16384ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1

3743: Al/Mesh (Thick-Al) - 1x1 - 512ms

Open

Thin-Al/Mesh

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

3852: Ti/Poly (Thick Be) - 1x1 -1024ms

Open

Ti/Polyimide

Open

Thick-Be

Close

Safe

Normal

1024 (19)

Observation

1x1