Program: AR (Filter-Ratio), thin-Be context, 384x384, 240s cad, offset
File: XRTPRG-185B
Author: GOTO, Tomoko
Loops: Indefinite
Duration: :01:02:02.5
Size: 37.1 M
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
1 |
Subr-A |
1 |
:02.0 |
:01:55.0 |
6.19 M |
|||||
1.1 |
Ti/poly (Thick-Al), thin-Be (med-Be) - 384FOV - AEC3 - 1064 1048 for normal AR |
4 |
:02.0 |
:01:55.0 |
6.19 M |
|||||
1.1.1 |
Ti/Poly (Thick Al) - 1x1 - 512ms |
:02.0 |
:02.6 |
774. K |
h=1064 v=1048 w=384 h=384 |
43% |
3 |
KSC, SSOC |
Regular |
|
1.1.2 |
Thin-Be (Med-Be) - 1x1 - 16384ms |
:02.0 |
:26.0 |
774. K |
h=1064 v=1048 w=384 h=384 |
43% |
3 |
KSC, SSOC |
Regular |
|
2 |
Subr-B |
1 |
:02.0 |
:01:00:00.0 |
30.9 M |
|||||
2.1 |
Al/Mesh-Ti/Poly-1x1-384x384-AEC3-Q95-at_1064_1048 |
20 |
:03:00.0 |
:01:00:00.0 |
30.9 M |
|||||
2.1.1 |
Al/Mesh (Thick-Al) - 1x1 - 512ms |
:02.0 |
:08.6 |
774. K |
h=1064 v=1048 w=384 h=384 |
43% |
3 |
KSC, SSOC |
Regular |
|
2.1.2 |
Ti/Poly (Thick Be) - 1x1 -1024ms |
:58.0 |
:58.0 |
774. K |
h=1064 v=1048 w=384 h=384 |
43% |
3 |
KSC, SSOC |
Regular |
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
352F: Ti/Poly (Thick Al) - 1x1 - 512ms |
Open |
Ti/Polyimide |
Open |
Thick-Al |
Close |
Safe |
Normal |
512 (17) |
Observation |
1x1 |
358C: Thin-Be (Med-Be) - 1x1 - 16384ms |
Thin-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
16384 (27) |
Observation |
1x1 |
3743: Al/Mesh (Thick-Al) - 1x1 - 512ms |
Open |
Thin-Al/Mesh |
Open |
Thick-Al |
Close |
Safe |
Normal |
512 (17) |
Observation |
1x1 |
3852: Ti/Poly (Thick Be) - 1x1 -1024ms |
Open |
Ti/Polyimide |
Open |
Thick-Be |
Close |
Safe |
Normal |
1024 (19) |
Observation |
1x1 |