Program: AR Standard-A(Filter-Ratio) with PFB, thin-Be and Al/Poly context, 384x384 at 1064 1048, 60s cad
File: XRTPRG-185F
Author: YAJI, Kentaro
Loops: Indefinite
Duration: :33:47.7
Size: 42.0 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:02:34.7

11.1 M

1.1

G-band and Dark (16sec) - 384x384 - 1064 1048 - Q98

1

:02.0

:22.9

1.84 M

1.1.1

Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

:02.0

:18.5

921. K

h=1064 v=1048 w=384 h=384

52%

0

KSC, SSOC

Regular

1.1.2

G-Band - 1x1 - 64ms

:02.0

:04.3

921. K

h=1064 v=1048 w=384 h=384

52%

0

KSC, SSOC

Regular

1.2

Ti/poly (Thick-Al), thin-Be (med-Be), Al/Poly (Med-Be) - 384FOV - AEC3 - 1064 1048 for normal AR

4

:02.0

:02:11.8

9.29 M

1.2.1

Ti/Poly (Thick Al) - 1x1 - 512ms

:02.0

:04.1

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

1.2.2

Al/poly (Med-Be) - 1x1 - 512ms

:02.0

:07.1

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

1.2.3

Thin-Be (Med-Be) - 1x1 - 16384ms

:02.0

:21.5

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2

Subr-B

1

:02.0

:31:05.5

30.9 M

2.1

PFB-Thin-Be-Ti/Poly-1x1-384x384-AEC3-Q95-at_1064_1048-2

20

:02.0

:31:05.5

30.9 M

2.1.1

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:02.6

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2.1.2

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

774. K

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Regular

2.1.3

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:10.1

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-1

2.1.4

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-1

2.1.5

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:10.1

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-2

2.1.6

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-2

2.1.7

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:10.1

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-3

2.1.8

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

00.0 M

h=1064 v=1048 w=384 h=384

43%

3

KSC, SSOC

Preflare-3

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

36E3: Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Dark

16384 (27)

Observation

1x1

3605: G-Band - 1x1 - 64ms

Open

G-band

Open

G-band

Open

Safe

Normal

64 (11)

Observation

1x1

352F: Ti/Poly (Thick Al) - 1x1 - 512ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

3872: Al/poly (Med-Be) - 1x1 - 512ms

Thin-Al/Polyimide

Open

Medium-Be

Open

Close

Safe

Normal

512 (17)

Observation

1x1

358C: Thin-Be (Med-Be) - 1x1 - 16384ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1

3871: Thin-Be (Thick-Al) - 1x1 - 512ms

Thin-Be

Open

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

3852: Ti/Poly (Thick Be) - 1x1 -1024ms

Open

Ti/Polyimide

Open

Thick-Be

Close

Safe

Normal

1024 (19)

Observation

1x1