Program: AR Standard-A(Filter-Ratio) with PFB, thin-Be and Al/Poly context, 512x512 at 1064 1048, 120s cad-2
File: XRTPRG-1861
Author: SAKO, Nobuharu
Loops: Indefinite
Duration: :34:40.5
Size: 74.8 M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:02:42.5

19.7 M

1.1

G-band and Dark (16sec) - 512x512 - 1064 1048 - Q98

1

:02.0

:24.0

3.27 M

1.1.1

Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

:02.0

:19.1

1.63 M

h=1064 v=1048 w=512 h=512

52%

0

KSC, SSOC

Regular

1.1.2

G-Band - 1x1 - 64ms

:02.0

:04.9

1.63 M

h=1064 v=1048 w=512 h=512

52%

0

KSC, SSOC

Regular

1.2

Ti/poly (Thick-Al), thin-Be (med-Be), Al/Poly (Med-Be) - 512FOV - AEC3 - 1064 1048 for normal AR-2

4

:02.0

:02:18.5

16.5 M

1.2.1

Ti/Poly (Thick Al) - 1x1 - 512ms

:02.0

:04.7

1.37 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Regular

1.2.2

Al/poly (Med-Be) - 1x1 - 512ms

:02.0

:07.7

1.37 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Regular

1.2.3

Thin-Be (Med-Be) - 1x1 - 16384ms

:02.0

:22.1

1.37 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Regular

2

Subr-B

1

:02.0

:31:50.4

55.0 M

2.1

PFB-Thin-Be-Ti/Poly-1x1-512x512-AEC3-Q95-at_1064_1048-3

20

:02.0

:31:50.4

55.0 M

2.1.1

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:03.2

1.37 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Regular

2.1.2

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

1.37 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Regular

2.1.3

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:10.7

00.0 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Preflare-1

2.1.4

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

00.0 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Preflare-1

2.1.5

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:10.7

00.0 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Preflare-2

2.1.6

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

00.0 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Preflare-2

2.1.7

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:10.7

00.0 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Preflare-3

2.1.8

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

00.0 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Preflare-3

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

36E3: Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Dark

16384 (27)

Observation

1x1

3605: G-Band - 1x1 - 64ms

Open

G-band

Open

G-band

Open

Safe

Normal

64 (11)

Observation

1x1

352F: Ti/Poly (Thick Al) - 1x1 - 512ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

3872: Al/poly (Med-Be) - 1x1 - 512ms

Thin-Al/Polyimide

Open

Medium-Be

Open

Close

Safe

Normal

512 (17)

Observation

1x1

358C: Thin-Be (Med-Be) - 1x1 - 16384ms

Thin-Be

Open

Medium-Be

Open

Close

Safe

Normal

16384 (27)

Observation

1x1

3871: Thin-Be (Thick-Al) - 1x1 - 512ms

Thin-Be

Open

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

3852: Ti/Poly (Thick Be) - 1x1 -1024ms

Open

Ti/Polyimide

Open

Thick-Be

Close

Safe

Normal

1024 (19)

Observation

1x1