Program: AR High Cadence for SOT bakeout -Ti/pole - 15 sec
File: XRTPRG-1894
Author: SHIMOJO, Masumi
Loops: Indefinite
Duration: :45:48.6
Size: 255. M

Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:41.1

7.40 M

1.1

G-band and Dark (16sec) - 512x512 - 1064 1048 - Q98

1

:02.0

:24.0

3.27 M

1.1.1

Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

:02.0

:19.1

1.63 M

h=1064 v=1048 w=512 h=512

52%

0

KSC, SSOC

Regular

1.1.2

G-Band - 1x1 - 64ms

:02.0

:04.9

1.63 M

h=1064 v=1048 w=512 h=512

52%

0

KSC, SSOC

Regular

1.2

Al/Mesh (Ti/ploy), Ti/Poly (Thick-Al), Thick-Al, - 512FOV - 1064 1048 - AEC1

1

:02.0

:17.1

4.12 M

1.2.1

Al/Mesh (Ti/poly) - 1x1 - 128 ms

:02.0

:05.8

1.37 M

h=1064 v=1048 w=512 h=512

43%

1

KSC, SSOC

Regular

1.2.2

Ti/Poly (Thick Al) - 1x1 - 256ms

:02.0

:04.4

1.37 M

h=1064 v=1048 w=512 h=512

43%

1

KSC, SSOC

Regular

1.2.3

Thick-Al - 1x1 - 1024ms

:02.0

:06.7

1.37 M

h=1064 v=1048 w=512 h=512

43%

1

KSC, SSOC

Regular

2

Subr-B

1

:02.0

:45:00.0

247. M

2.1

Ti/Poly (Thick Al) - 512FOV - AEC3 - 1064 1048

180

:15.0

:45:00.0

247. M

2.1.1

Ti/Poly (Thick Al) - 1x1 - 512ms

:02.0

:06.2

1.37 M

h=1064 v=1048 w=512 h=512

43%

3

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

36E3: Ti/Poly (Thick Al) - 1x1 - 16384ms - dark

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Dark

16384 (27)

Observation

1x1

3605: G-Band - 1x1 - 64ms

Open

G-band

Open

G-band

Open

Safe

Normal

64 (11)

Observation

1x1

3698: Al/Mesh (Ti/poly) - 1x1 - 128 ms

Open

Thin-Al/Mesh

Open

Ti/Polyimide

Close

Safe

Normal

128 (13)

Observation

1x1

353A: Ti/Poly (Thick Al) - 1x1 - 256ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

256 (15)

Observation

1x1

3674: Thick-Al - 1x1 - 1024ms

Open

Thick-Al

Open

Thick-Al

Close

Safe

Normal

1024 (19)

Observation

1x1

352F: Ti/Poly (Thick Al) - 1x1 - 512ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1