Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-A

1

:02.0

:01:59.5

11.0 M

1.1

Al/Poly (Thin-Be), Al thick - 512FOV - 1x1 - AEC3 - 864_1456

4

:02.0

:01:59.5

11.0 M

1.1.1

Al/Poly (Thin-Be) - 1x1 - 512ms

:02.0

:03.2

1.37 M

h=864 v=1456 w=512 h=512

43%

3

KSC, SSOC

Regular

1.1.2

Thick-Al - 1x1 - 16384 ms

:02.0

:26.6

1.37 M

h=864 v=1456 w=512 h=512

43%

3

KSC, SSOC

Regular

2

Subr-B

1

:02.0

:57:30.0

63.3 M

2.1

Thin-Be-Ti/Poly-1x1-512x512-AEC3-Q95-at_864_1456

23

:02:30.0

:57:30.0

63.3 M

2.1.1

Thin-Be (Thick-Al) - 1x1 - 512ms

:02.0

:13.7

1.37 M

h=864 v=1456 w=512 h=512

43%

3

KSC, SSOC

Regular

2.1.2

Ti/Poly (Thick Be) - 1x1 -1024ms

:15.0

:15.0

1.37 M

h=864 v=1456 w=512 h=512

43%

3

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

37E3: Al/Poly (Thin-Be) - 1x1 - 512ms

Thin-Al/Polyimide

Open

Thin-Be

Open

Close

Safe

Normal

512 (17)

Observation

1x1

364E: Thick-Al - 1x1 - 16384 ms

Open

Thick-Al

Open

Thick-Al

Close

Safe

Normal

16384 (27)

Observation

1x1

3871: Thin-Be (Thick-Al) - 1x1 - 512ms

Thin-Be

Open

Open

Thick-Al

Close

Safe

Normal

512 (17)

Observation

1x1

3852: Ti/Poly (Thick Be) - 1x1 -1024ms

Open

Ti/Polyimide

Open

Thick-Be

Close

Safe

Normal

1024 (19)

Observation

1x1