Program: QS - Al/poly(thick-Al) + C/Poly(thin-Be) - AEC1 - short exposure
File: XRTPRG-13CF
Author: SHIMOJO, Masumi
Loops: Indefinite
Duration: :01:22:57.8
Size: 196. M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
subr |
1 |
:02.0 |
:01:22:50.3 |
196. M |
|||||
|
1.1 |
QS (Al/poly - C/poly) - 1x1- 512FOV - AEC1 - short exposure |
60 |
:02.0 |
:01:22:50.3 |
196. M |
|||||
|
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 4096ms |
:02.0 |
:06.8 |
1.63 M |
h=1024 v=1024 w=512 h=512 |
52% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
C/poly (Thin-Be) - 1x1 - 4096ms |
:01:16.0 |
:01:16.0 |
1.63 M |
h=1024 v=1024 w=512 h=512 |
52% |
1 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
35D3: Al/poly (Thick-Al) - 1x1 - 4096ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |
|
3540: C/poly (Thin-Be) - 1x1 - 4096ms |
C/Poly |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
4096 (23) |
Observation |
1x1 |