Program: CH Boundary - Al/poly + C/poly - AEC 1 - FOV 512 - 180s cadence
File: XRTPRG-144A
Loops: Indefinite
Duration: :12:18.4
Size: 16.2 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:02.0 |
:12:00.0 |
14.4 M |
|||||
|
1.1 |
CH Multi-filter Al/Poly C/poly sequence |
4 |
:03:00.0 |
:12:00.0 |
14.4 M |
|||||
|
1.1.1 |
Al/Poly (Thin-Be) - 1x1 - 8192ms |
:25.0 |
:25.0 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
C/poly (Thin-Be) - 1x1 - 8192ms |
:25.0 |
:25.0 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
1 |
KSC, SSOC |
Regular |
|
|
2 |
Subr-2 |
1 |
:02.0 |
:10.9 |
1.80 M |
|||||
|
2.1 |
XBP C/poly - FOV512 - Dark |
1 |
:02.0 |
:10.9 |
1.80 M |
|||||
|
2.1.1 |
C/Poly - 1x1 - 8192ms - Dark |
:02.0 |
:10.9 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
Al/Poly (Thin-Be) - 1x1 - 8192ms |
Thin-Al/Polyimide |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
8192 (25) |
Observation |
1x1 |
|
C/poly (Thin-Be) - 1x1 - 8192ms |
C/Poly |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
8192 (25) |
Observation |
1x1 |
|
C/Poly - 1x1 - 8192ms - Dark |
C/Poly |
Open |
C/Poly |
Open |
Close |
Safe |
Dark |
8192 (25) |
Observation |
1x1 |