Program: HOP43 Ti/poly - 25s cad - 23s exp - FOV384 + Al/poly, thin-Be and Dark-2
File: XRTPRG-144F
Loops: Indefinite
Duration: :23:00.3
Size: 53.9 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
50 |
:02.0 |
:21:06.2 |
50.8 M |
|||||
|
1.1 |
CH (Ti/poly) - 23s exp - FOV 384 |
1 |
:02.0 |
:25.3 |
1.01 M |
|||||
|
1.1.1 |
Ti/Poly - 1x1 - 23142ms |
:02.0 |
:25.3 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
2 |
Subr-2 |
1 |
:02.0 |
:01:46.6 |
3.05 M |
|||||
|
2.1 |
CH (Al/poly) - 23s exp - FOV 384 |
1 |
:02.0 |
:29.8 |
1.01 M |
|||||
|
2.1.1 |
Al/poly (Al/poly+Thick-Al) - 1x1 - 23142ms |
:02.0 |
:29.8 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
2.2 |
CH (Al/poly) - 23s exp - FOV 384- dark |
1 |
:02.0 |
:25.3 |
1.01 M |
|||||
|
2.2.1 |
Al/Poly - 1x1 - 23142ms - Dark -Obs |
:02.0 |
:25.3 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
2.3 |
CH (Be-thin) - 48s exp - FOV 384 |
1 |
:02.0 |
:51.4 |
1.01 M |
|||||
|
2.3.1 |
Thin-Be (Med-Be) - 1x1 - 46284ms |
:02.0 |
:51.4 |
1.01 M |
h=1024 v=1024 w=384 h=384 |
57% |
0 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
Ti/Poly - 1x1 - 23142ms |
Open |
Ti/Polyimide |
Open |
Ti/Polyimide |
Close |
Safe |
Normal |
23142 (28) |
Observation |
1x1 |
|
Al/poly (Al/poly+Thick-Al) - 1x1 - 23142ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
23142 (28) |
Observation |
1x1 |
|
Al/Poly - 1x1 - 23142ms - Dark -Obs |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
23142 (28) |
Observation |
1x1 |
|
Thin-Be (Med-Be) - 1x1 - 46284ms |
Thin-Be |
Open |
Medium-Be |
Open |
Close |
Safe |
Normal |
46284 (30) |
Observation |
1x1 |