Level

Name/Info

Loop

Interval

Duration

Size

FOV

Comp

AEC

DMF

BUFF

1

Subr-1

3

:02.0

:44:30.0

86.8 M

1.1

Ti/Poly - 2x2 - 512x512 - AEC2 - Matching-EIS-FOV

40

:20.0

:13:20.0

18.0 M

1.1.1

Ti/Poly (Thick Al) - 2x2 - 2048ms

:02.0

:03.1

452. K

h=1056 v=1000 w=512 h=512

57%

2

KSC, SSOC

Regular

1.2

Al/poly +C/Poly + Thin-Be - 2x2 - FOV1024 - AEC 2-3

1

:02.0

:01:30.0

10.8 M

1.2.1

Al/poly (Thick-Al) - 2x2 - 2048ms

:10.0

:10.0

1.80 M

h=1024 v=1024 w=1024 h=1024

57%

2

KSC, SSOC

Regular

1.2.2

C/Poly (Med-Be) - 2x2 - 1024ms

:15.0

:15.0

1.80 M

h=1024 v=1024 w=1024 h=1024

57%

2

KSC, SSOC

Regular

1.2.3

Thin-Be - 2x2 - 2048ms

:20.0

:20.0

1.80 M

h=1024 v=1024 w=1024 h=1024

57%

2

KSC, SSOC

Regular

1.2.4

Al/poly (Thick-Al) - 2x2 - 2048ms

:10.0

:10.0

1.80 M

h=1024 v=1024 w=1024 h=1024

57%

3

KSC, SSOC

Regular

1.2.5

C/Poly (Med-Be) - 2x2 - 1024ms

:15.0

:15.0

1.80 M

h=1024 v=1024 w=1024 h=1024

57%

3

KSC, SSOC

Regular

1.2.6

Thin-Be - 2x2 - 2048ms

:20.0

:20.0

1.80 M

h=1024 v=1024 w=1024 h=1024

57%

3

KSC, SSOC

Regular

2

Subr-2

1

:02.0

:12.6

409. K

2.1

Dark Cal - Ti/poly - 2x2 - 512x512 - Matching-EIS-FOV

1

:02.0

:12.6

409. K

2.1.1

Ti/Poly - 2x2 - 4096ms - Dark

:02.0

:12.6

409. K

h=1056 v=1000 w=512 h=512

52%

0

KSC, SSOC

Regular

3

Subr-3

1

:02.0

:06.8

6.55 M

3.1

Ti/Poly - 2x2 - 2048x2048 - 4096ms

1

:02.0

:06.8

6.55 M

3.1.1

Ti/Poly - 2x2 - 4096ms

:02.0

:06.8

6.55 M

h=1024 v=1024 w=2048 h=2048

52%

0

KSC, SSOC

Regular

Parameter Name

FW-A1

FW-B1

FW-A2

FW-B2

VLS

Cadence

Image Type

Exposure

Calibration

Resolution

Ti/Poly (Thick Al) - 2x2 - 2048ms

Open

Ti/Polyimide

Open

Thick-Al

Close

Safe

Normal

2048 (21)

Observation

2x2

Al/poly (Thick-Al) - 2x2 - 2048ms

Thin-Al/Polyimide

Open

Thin-Al/Polyimide

Thick-Al

Close

Safe

Normal

2048 (21)

Observation

2x2

C/Poly (Med-Be) - 2x2 - 1024ms

C/Poly

Open

Medium-Be

Open

Close

Safe

Normal

1024 (19)

Observation

2x2

Thin-Be - 2x2 - 2048ms

Thin-Be

Open

Thin-Be

Open

Close

Safe

Normal

2048 (21)

Observation

2x2

Ti/Poly - 2x2 - 4096ms - Dark

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Dark

4096 (23)

Observation

2x2

Ti/Poly - 2x2 - 4096ms

Open

Ti/Polyimide

Open

Ti/Polyimide

Close

Safe

Normal

4096 (23)

Observation

2x2