Program: Comp Evaluation in QS - Al/poly - Q=92, 85, 65 - bin=1x1, 2x2, 4x4
File: XRTPRG-14E0
Loops: 5
Duration: :50:37.5
Size: 41.0 M
|
Level |
Name/Info |
Loop |
Interval |
Duration |
Size |
FOV |
Comp |
AEC |
DMF |
BUFF |
|
1 |
Subr-1 |
1 |
:10:00.0 |
:10:00.0 |
8.20 M |
|||||
|
1.1 |
Comp Evalu in QS - Al/poly - 1x1 - 512 x 512 - Q=92,85,65 |
1 |
:02.0 |
:01:11.5 |
6.25 M |
|||||
|
1.1.1 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
1.1.2 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
1.11 M |
h=1024 v=1024 w=512 h=512 |
35% |
0 |
KSC, SSOC |
Regular |
|
|
1.1.3 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
865. K |
h=1024 v=1024 w=512 h=512 |
27% |
0 |
KSC, SSOC |
Regular |
|
|
1.1.4 |
Al/poly (Thick-Al) - 1x1 - 11571ms |
:02.0 |
:14.3 |
655. K |
h=1024 v=1024 w=512 h=512 |
20% |
0 |
KSC, SSOC |
Regular |
|
|
1.1.5 |
Al/poly - 1x1 - 11571ms - Dark - Obs |
:02.0 |
:14.3 |
1.80 M |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
1.2 |
Comp Evalu in QS - Al/poly - 2x2 - 512 x 512 - Q=92,85,65 |
1 |
:02.0 |
:19.8 |
1.56 M |
|||||
|
1.2.1 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
452. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
1.2.2 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
278. K |
h=1024 v=1024 w=512 h=512 |
35% |
0 |
KSC, SSOC |
Regular |
|
|
1.2.3 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
216. K |
h=1024 v=1024 w=512 h=512 |
27% |
0 |
KSC, SSOC |
Regular |
|
|
1.2.4 |
Al/poly (Thick-Al) - 2x2 - 2897ms |
:02.0 |
:03.9 |
163. K |
h=1024 v=1024 w=512 h=512 |
20% |
0 |
KSC, SSOC |
Regular |
|
|
1.2.5 |
Al/poly - 2x2 - 2897ms - Dark |
:02.0 |
:03.9 |
452. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
1.3 |
Comp Evalu in QS - Al/poly - 4x4 - 512 x 512 - Q=92,85,56 |
1 |
:02.0 |
:10.0 |
390. K |
|||||
|
1.3.1 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
113. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
|
1.3.2 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
69.6 K |
h=1024 v=1024 w=512 h=512 |
35% |
0 |
KSC, SSOC |
Regular |
|
|
1.3.3 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
54.0 K |
h=1024 v=1024 w=512 h=512 |
27% |
0 |
KSC, SSOC |
Regular |
|
|
1.3.4 |
Al/poly (Thin-Be) - 4x4 - 723ms |
:02.0 |
:02.0 |
40.9 K |
h=1024 v=1024 w=512 h=512 |
20% |
0 |
KSC, SSOC |
Regular |
|
|
1.3.5 |
Al/poly - 4x4 - 723ms - Dark |
:02.0 |
:02.0 |
113. K |
h=1024 v=1024 w=512 h=512 |
57% |
0 |
KSC, SSOC |
Regular |
|
Parameter Name |
FW-A1 |
FW-B1 |
FW-A2 |
FW-B2 |
VLS |
Cadence |
Image Type |
Exposure |
Calibration |
Resolution |
|
Al/poly (Thick-Al) - 1x1 - 11571ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
11571 (26) |
Observation |
1x1 |
|
Al/poly - 1x1 - 11571ms - Dark - Obs |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
11571 (26) |
Observation |
1x1 |
|
Al/poly (Thick-Al) - 2x2 - 2897ms |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Thick-Al |
Close |
Safe |
Normal |
2897 (22) |
Observation |
2x2 |
|
Al/poly - 2x2 - 2897ms - Dark |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
2897 (22) |
Observation |
2x2 |
|
Al/poly (Thin-Be) - 4x4 - 723ms |
Thin-Al/Polyimide |
Open |
Thin-Be |
Open |
Close |
Safe |
Normal |
723 (18) |
Observation |
4x4 |
|
Al/poly - 4x4 - 723ms - Dark |
Thin-Al/Polyimide |
Open |
Thin-Al/Polyimide |
Open |
Close |
Safe |
Dark |
723 (18) |
Observation |
4x4 |